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Automatic Online flatness and surface appearance system:UltraSort200
Sapphire/SIC wafer flatness and surface appearance system:FM200
Sapphire 3D Microscope:HS-WDI-2000
Sapphire Surface quality Measurement system:SQM-500W
Sapphire Defect Laser Probe and Glasses:LP-100
Sapphire polariscope optic modulator:PKS-250M
Wafer Defect observing instrument:HS-WDI
Semi-Automatic Contactless Wafer Detector:HS-NCS-200SA
Wafer Roughness Detector:HS-SRT-301
4-Probe Resistivity and Resistance Tester:HS-MPRT-5
Silicon O/C Content Tester:HS-OCT-2000
Silicon Phosphor and Boron Analyze system: HS-ICP-MS
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